rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Low energy ion assisted film growth
  name:
    name part: González-Elipe, A. R.
    role:
      role term: creator
  name:
    name part: Yubero, F.
  name:
    name part: Sanz, J. M. (José María)
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: enk
    date issued: 2003
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiv, 283 pages : illustrations ; 24 cm.
  note: A.R. González-Elipe, F. Yubero, J.M. Sanz.
  note: Includes bibliographical references and index.
  subject:
    topic: Thin films
    topic: Design and construction
  subject:
    topic: Thin films
    topic: Effect of radiation on
  subject:
    topic: Ion bombardment
  identifier: 1860943519
  record info:
    record content source: UUM
    record creation date: 030711
    record change date: 20151025081843.0
    record identifier: in00001778631