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Lecture notes on principles of plasma processing /

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Bibliographic Details
Main Author: Chen, Francis F., 1929-
Other Authors: Chang, Jane P., 1970-
Format: Book
Language:English
Published: New York : Kluwer Academic/Plenum Publishers, 2003.
Subjects:
Plasma engineering.
Plasma chemistry.
Plasma dynamics.
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by Chen, Francis F.
Published 2003
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