rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Lecture notes on principles of plasma processing
  title info:
    title: Principles of plasma processing
  name:
    name part: Chen, Francis F.
    name part: 1929-
    role:
      role term: creator
  name:
    name part: Chang, Jane P.
    name part: 1970-
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nyu
    date issued: 2003
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 208 pages : illustrations ; 28 cm. + + 1 CD-ROM (4 3/4 in.)
  note: Francis F. Chen and Jane P. Chang.
  subject:
    topic: Plasma engineering
  subject:
    topic: Plasma chemistry
  subject:
    topic: Plasma dynamics
  classification: TA2020 .C454 2003
  classification: 621.044
  identifier: 0306474972
  identifier: 2002040665
  record info:
    record content source: DLC
    record creation date: 021030
    record change date: 20151025082922.0
    record identifier: in00001776240