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Lecture notes on principles of plasma processing /

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Bibliographic Details
Main Author: Chen, Francis F., 1929-
Other Authors: Chang, Jane P., 1970-
Format: Book
Language:English
Published: New York : Kluwer Academic/Plenum Publishers, 2003.
Subjects:
Plasma engineering.
Plasma chemistry.
Plasma dynamics.
Description
Physical Description:ix, 208 pages : illustrations ; 28 cm. + + 1 CD-ROM (4 3/4 in.)
ISBN:0306474972