Principles of chemical vapor deposition /

Bibliographic Details
Main Author: Dobkin, Daniel Mark
Other Authors: Zuraw, Michael K.
Format: Book
Language:English
Published: Dordrecht ; Boston : Kluwer Academic Publishers, [2003]
Subjects:
Description
Physical Description:xi, 273 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1402012489 (alk. paper)