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19th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 13-15 January 2003, Sonthofen, Germany /

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Bibliographic Details
Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents Sonthofen, Germany, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Semiconductor Equipment and Materials Institute. Europe, Society of Photo-optical Instrumentation Engineers
Other Authors: Behringer, Uwe F. W.
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5148.
Subjects:
Integrated circuits > Masks > Congresses.
Microlithography > Congresses.
Description
Physical Description:li, 264 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819450189