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Microlithography : science and technology /

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Bibliographic Details
Corporate Author: NetLibrary, Inc
Other Authors: Sheats, James R., 1948-, Smith, Bruce W., 1959-
Format: eBook
Language:English
Published: New York : Marcel Dekker, [1998]
Subjects:
Microlithography > Industrial applications.
Integrated circuits > Masks.
Metal oxide semiconductors, Complementary > Design and construction.
Manufacturing processes.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:xii, 780 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0585139334 (electronic bk.) :