Cover Image

Laser micromachining for optoelectronic device fabrication : 30 October 2002, Brugge, Belgium /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, European Optical Society
Other Authors: Ostendorf, Andreas
Format: Book
Language:English
Published: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©2003.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4941.
Subjects:
Optoelectronic devices > Design and construction > Congresses.
Lasers > Industrial applications > Congresses.
Micromachining > Congresses.
Lasers > Industrial applications.
Micromachining.
Optoelectronic devices > Design and construction.
Conference papers and proceedings.
Online Access:Rutgers restricted.
Table of Contents:
  • Fabrication of gratings
  • Multiphoton processes
  • F₂ laser machining
  • Laser microfabrication techniques
  • Thin film processing.