http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Laser micromachining for optoelectronic device fabrication
Society of Photo-optical Instrumentation Engineers
Fabrication of gratings -- Multiphoton processes -- F₂ laser machining -- Laser microfabrication techniques -- Thin film processing.
Andreas Ostendorf, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, EOS--European Optical Society [and others].
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4941