rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Laser micromachining for optoelectronic device fabrication
    sub title: 30 October 2002, Brugge, Belgium
  name:
    name part: Ostendorf, Andreas.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: European Optical Society
  type of resource: text
  genre: bibliography
  genre: conference publication
  genre: Conference papers and proceedings.
  origin info:
    place:
      place term: wau
    place:
      place term: Bellingham, Wash
    publisher: Society of Photo-optical Instrumentation Engineers
    date issued: ©2003
    date issued: 2003
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: vii, 158 pages : illustrations ; 28 cm.
  table of contents: Fabrication of gratings -- Multiphoton processes -- F₂ laser machining -- Laser microfabrication techniques -- Thin film processing.
  note: Andreas Ostendorf, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, EOS--European Optical Society [and others].
  note: Also issued online.
  note: Includes bibliographical references and index.
  subject:
    topic: Optoelectronic devices
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Lasers
    topic: Industrial applications
    genre: Congresses
  subject:
    topic: Micromachining
    genre: Congresses
  subject:
    topic: Lasers
    topic: Industrial applications
  subject:
    topic: Micromachining
  subject:
    topic: Optoelectronic devices
    topic: Design and construction
  classification: TK8300 .L37 2003
  classification: 621.381/045
  related item:
    title info:
      title: Laser micromachining for optoelectronic device fabrication
    origin info:
      publisher: Bellingham, Wash., USA : SPIE, ©2003
    identifier: (OCoLC)603649528
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 4941
  identifier: 0819447366
  identifier: 9780819447364
  identifier: 2004268397
  identifier: http://link.spie.org/PSISDG/4941/1
  related item:
    location:
      url: http://link.spie.org/PSISDG/4941/1
  record info:
    record content source: CUS
    record creation date: 030506
    record change date: 20181214105952.0
    record identifier: in00001754474
    language of cataloging:
      language term: eng