Cover Image

Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors: Johnson, Eric G.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4984.
Subjects:
Integrated optics > Congresses.
Miniature electronic equipment > Design and construction > Congresses.
Optoelectronic devices > Design and construction > Congresses.
Micromachining > Congresses.
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses.
Description
Item Description:Earlier conference has title: Micromachining technology for micro-optics.
Physical Description:xlii, 262 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819447846