APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, & Johnson, E. G. (2003). Micromachining technology for micro-optics and nano-optics: 28-29 January 2003, San Jose, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, and Eric G. Johnson. Micromachining Technology for Micro-optics and Nano-optics: 28-29 January 2003, San Jose, California, USA. Bellingham, Washington: SPIE, 2003.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Micromachining Technology for Micro-optics and Nano-optics: 28-29 January 2003, San Jose, California, USA. SPIE, 2003.