Cover Image

MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors: Smith, James H., Krulevitch, Peter A., Lakner, Hubert K.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4983.
Subjects:
Microelectromechanical systems > Congresses.
Miniature electronic equipment > Congresses.
Micromechanics > Congresses.
Optics, Adaptive > Congresses.
Optical scanners > Congresses.
Description
Physical Description:xlvi, 368 pages : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819447838