APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, Smith, J. H., Krulevitch, P. A., & Lakner, H. K. (2003). MOEMS and miniaturized systems III: 27-29 January 2003, San Jose, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, James H. Smith, Peter A. Krulevitch, and Hubert K. Lakner. MOEMS and Miniaturized Systems III: 27-29 January 2003, San Jose, California, USA. Bellingham, Washington: SPIE, 2003.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. MOEMS and Miniaturized Systems III: 27-29 January 2003, San Jose, California, USA. SPIE, 2003.