rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Reliability, testing, and characterization of MEMS/MOEMS II
    sub title: 27-29 January 2003, San Jose, California, USA
  title info:
    title: Reliability, testing and characterization of MEMS/MOEMS two
  title info:
    title: Reliability, testing and characterization of MEMS/MOEMS 2
  name:
    name part: Ramesham, Rajeshuni.
  name:
    name part: Tanner, Danelle Mary
    name part: 1952-
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: Semiconductor Equipment and Materials International
  name:
    name part: Solid State Technology (Organization)
  name:
    name part: Sandia National Laboratories
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2003
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xliv, 334 pages : illustrations (some color) ; 28 cm.
  note: Rajeshuni Ramesham, Danelle M. Tanner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    topic: Reliability
    genre: Congresses
  subject:
    topic: Microelectromechanical systems
    topic: Testing
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 4980
  identifier: 0819447803
  record info:
    record content source: CUS
    record creation date: 030321
    record change date: 20151025051900.0
    record identifier: in00001742911