http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Reliability, testing, and characterization of MEMS/MOEMS II
27-29 January 2003, San Jose, California, USA
Reliability, testing and characterization of MEMS/MOEMS two
Reliability, testing and characterization of MEMS/MOEMS 2
Society of Photo-optical Instrumentation Engineers
Semiconductor Equipment and Materials International
xliv, 334 pages : illustrations (some color) ; 28 cm.
Rajeshuni Ramesham, Danelle M. Tanner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4980