Cover Image

Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors: Ramesham, Rajeshuni, Tanner, Danelle Mary, 1952-
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4980.
Subjects:
Microelectromechanical systems > Reliability > Congresses.
Microelectromechanical systems > Testing > Congresses.
Description
Physical Description:xliv, 334 pages : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819447803