Micromachining and microfabrication process technology VIII : 27-29 January 2003, San Jose, California, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors:	Yasaitis, John, Perez-Maher, Mary Ann, Karam, Jean-Michel
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2003]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4979.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/4979.toc

Description
Physical Description:	ix, 604 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	081944779X