APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Yasaitis, J., Perez-Maher, M. A., & Karam, J. (2003). Micromachining and microfabrication process technology VIII: 27-29 January 2003, San Jose, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, John Yasaitis, Mary Ann Perez-Maher, and Jean-Michel Karam. Micromachining and Microfabrication Process Technology VIII: 27-29 January 2003, San Jose, California, USA. Bellingham, Washington: SPIE, 2003.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Micromachining and Microfabrication Process Technology VIII: 27-29 January 2003, San Jose, California, USA. SPIE, 2003.