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MEMS/MOEMS technologies and applications : 17-18 October 2002, Shanghai, China /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Zhongguo guang xue xue hui, Shanghai jiao tong da xue, Guo jia zi ran ke xue ji jin wei yuan hui (China)
Other Authors: Jin, Guofan, McKillop, John S., Hane, Kazuhiro
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2002]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4928.
Subjects:
Microelectromechanical systems > Congresses.
Optoelectronic devices > Congresses.
Description
Physical Description:ix, 302 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:081944717X