rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Silicon front-end junction formation technologies
  name:
    name part: Downey, Daniel F.
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: pau
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xi, 312 pages : illustrations ; 24 cm.
  note: editors, Daniel F. Downey [and others].
  note: Includes bibliographical references and indexes.
  subject:
    topic: Semiconductors
    topic: Junctions
    genre: Congresses
  classification: TK7871.85 .S5455 2002
  classification: 621.3815/282
  related item:
    title info:
      title: Materials Research Society symposia proceedings ; v. 717
  identifier: 1558996532
  identifier: 2002029523
  record info:
    record content source: DLC
    record creation date: 020719
    record change date: 20151024212037.0
    record identifier: in00001734529