Cover Image

Silicon front-end junction formation technologies /

Bibliographic Details
Other Authors: Downey, Daniel F.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2002]
Series:Materials Research Society symposia proceedings ; v. 717.
Subjects:
Semiconductors > Junctions > Congresses.
Description
Physical Description:xi, 312 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558996532