APA (7th ed.) Citation

Downey, D. F. (2002). Silicon front-end junction formation technologies. Materials Research Society.

Chicago Style (17th ed.) Citation

Downey, Daniel F. Silicon Front-end Junction Formation Technologies. Warrendale, Pa.: Materials Research Society, 2002.

MLA (9th ed.) Citation

Downey, Daniel F. Silicon Front-end Junction Formation Technologies. Materials Research Society, 2002.