Process technology for silicon carbide devices /

Bibliographic Details
Corporate Author: Institution of Electrical Engineers
Other Authors: Zetterling, Carl-Mikael
Format: Book
Language:English
Published: London : INSPEC, [2002]
Series:EMIS processing series ; no. 2.
Subjects:
Description
Physical Description:xxii, 176 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0852969988