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Modeling MEMS and NEMS /

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Bibliographic Details
Main Author: Pelesko, John A.
Other Authors: Bernstein, David H.
Format: Book
Language:English
Published: Boca Raton, Fla. : Chapman & Hall/CRC, [2003]
Subjects:
Microelectromechanical systems > Mathematical models.
Description
Physical Description:xxiii, 357 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages 325-340) and index.
ISBN:1584883065 (alk. paper)