http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Microelectronics and nanometer structures
J. vac. sci. technol., B, Microelectron. nanometer struct. process. meas. phenom
Journal of vacuum science and technology
$i Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology
An international journal devoted to microelectronics and nanometer structures. Processing, measurement, and phenomena
Microelectronics and nanometer structures (Online)
Title from issue HTML table of contents (Scitation site, viewed Sept. 21, 2006).
Latest issue consulted: Volume 24, number 4 (Jul./Aug. 2006) (viewed Sept. 21, 2006).
"An official publication of the American Vacuum Society."
Issued also in print format and on CD-ROM under the title: JVST. A & B.
Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
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