rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Journal of vacuum science & technology
    sub title: processing, measurement, and phenomena
    part number: B
    part name: Microelectronics and nanometer structures
  title info:
    title: J. vac. sci. technol., B, Microelectron. nanometer struct. process. meas. phenom
    sub title: (Online)
  title info:
    title: Journal of vacuum science and technology
    part number: B
    part name: Microelectronics and nanometer structures
  title info:
    title: Journal of vacuum science and technology
    part number: B. Online
  title info:
    title: Microelectronics and nanometer structures
  title info:
    title: JVST B
  title info:
    title: $i Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology
    part number: B
    part name: An international journal devoted to microelectronics and nanometer structures. Processing, measurement, and phenomena
  title info:
    title: Journal of vacuum science & technology
    part number: B
    part name: Microelectronics and nanometer structures (Online)
  name:
    name part: American Vacuum Society
  name:
    name part: American Institute of Physics
  type of resource: text
  genre: periodical
  origin info:
    place:
      place term: nyu
    date issued: 1991
    date issued: 9999
    issuance: continuing
    frequency: Bimonthly
  language:
    language term: eng
  physical description:
    form: electronic
    form: remote
  note: Published: Melville, NY., 2003-
  note: Title from issue HTML table of contents (Scitation site, viewed Sept. 21, 2006).
  note: Latest issue consulted: Volume 24, number 4 (Jul./Aug. 2006) (viewed Sept. 21, 2006).
  note: Electronic resource.
  note: Mode of access: World Wide Web.
  note: "An official publication of the American Vacuum Society."
  note: Issued also in print format and on CD-ROM under the title: JVST. A & B.
  subject:
    topic: Vacuum technology
    genre: Periodicals
  subject:
    topic: Microelectronics
    genre: Periodicals
  subject:
    topic: Nanostructured materials
    genre: Periodicals
  subject:
    topic: Vide (Technologie)
    genre: Périodiques
  subject:
    topic: Microélectronique
    genre: Périodiques
  subject:
    topic: Matériaux nanocristallins
    genre: Périodiques
  classification: TJ940 .J669 Electronic
  classification: 621
  related item:
    title info:
      title: Journal of vacuum science & technology. B, Microelectronics and nanometer structures
    identifier: 1071-1023
    identifier: (OCoLC)23276603
    identifier: (DLC) 94657460
  related item:
    title info:
      title: JVST
    note: A & B
    identifier: 1071-8028
    identifier: (OCoLC)28742810
  related item:
    title info:
      title: Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
    identifier: (OCoLC)71441616
    identifier: (DLC) 2006263268
  identifier: 1520-8567
  identifier: sn 98004662
  identifier: SLACK Inc., 6900 Grove Road, Thorofare, NJ 08086
  identifier: American Institute of Physics, suite 1No1, 2 Huntington Quadrangle, Melville, NY 11747-4502
  record info:
    record content source: GZM
    record creation date: 970721
    record change date: 20151024184904.0
    record identifier: in00001725076