rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Materials & process integration for MEMS
  title info:
    title: Materials and process integration for MEMS
  name:
    name part: Tay, Francis E. H.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: mau
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xix, 299 pages : illustrations ; 25 cm.
  note: edited by Francis E.H. Tay.
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
  classification: TK7875 .M373 2002
  classification: 621.381
  related item:
    title info:
      title: Microsystems (Series) ; v. 9
  identifier: 1402071752 (alk. paper)
  identifier: 2002031635
  record info:
    record content source: DLC
    record creation date: 020801
    record change date: 20151024183310.0
    record identifier: in00001715819