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Materials & process integration for MEMS /

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Bibliographic Details
Other Authors: Tay, Francis E. H.
Format: Book
Language:English
Published: Boston : Kluwer, [2002]
Series:Microsystems (Series) ; v. 9.
Subjects:
Microelectromechanical systems.
Description
Physical Description:xix, 299 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1402071752 (alk. paper)