rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
    sub title: fundamental mechanisms and application to IC interconnect technology
  name:
    name part: Borst, Christopher L. (Christopher Lyle)
    role:
      role term: creator
  name:
    name part: Gill, William N.
  name:
    name part: Gutmann, Ronald J.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: mau
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiv, 229 pages : illustrations ; 25 cm.
  note: by Christopher L. Borst, William N. Gill, Ronald J. Gutmann.
  note: Includes bibliographical references and index.
  subject:
    topic: Interconnects (Integrated circuit technology)
  subject:
    topic: Semiconductors
    topic: Polishing
  subject:
    topic: Grinding and polishing
  classification: TK7874.53 .B67 2002
  classification: 621.3815/2
  identifier: 1402071930
  identifier: 2002028782
  record info:
    record content source: DLC
    record creation date: 020718
    record change date: 20151024180111.0
    record identifier: in00001714590