http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
fundamental mechanisms and application to IC interconnect technology
Borst, Christopher L. (Christopher Lyle)
by Christopher L. Borst, William N. Gill, Ronald J. Gutmann.
Includes bibliographical references and index.
Interconnects (Integrated circuit technology)