Optical metrology /

Bibliographic Details
Main Author: Gåsvik, Kjell J.
Format: Book
Language:English
Published: Chichester, England ; Hoboken, NJ : J. Wiley & Sons, [2002]
Edition:3rd ed.
Subjects:
Online Access:Table of contents
Description
Physical Description:x, 360 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages [347]-353) and index.
ISBN:0470843004 (acid-free paper)