APA (7th ed.) Citation

Makabe, T. (2002). Advances in low temperature rf plasmas: Basis for process design. North Holland/Elsevier.

Chicago Style (17th ed.) Citation

Makabe, T. Advances in Low Temperature Rf Plasmas: Basis for Process Design. Amsterdam ; Boston: North Holland/Elsevier, 2002.

MLA (9th ed.) Citation

Makabe, T. Advances in Low Temperature Rf Plasmas: Basis for Process Design. North Holland/Elsevier, 2002.