rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Design, test, integration, and packaging of MEMS/MOEMS 2002
    sub title: 6-8 May 2002, Cannes, France
  name:
    name part: Courtois, B. (Bernard)
  name:
    name part: Centre national de la recherche scientifique (France)
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xvii, 832 pages : illustrations ; 28 cm.
  note: Bernard Courtois [and others] chairs/editors ; sponsored by CNRS-INPG-UJF (France) [and others].
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    genre: Congresses
  subject:
    topic: Optoelectronic devices
    genre: Congresses
  subject:
    topic: Micromachining
    genre: Congresses
  subject:
    topic: Microelectronic packaging
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 4755
  identifier: 0819445185
  record info:
    record content source: LHL
    record creation date: 020621
    record change date: 20151024154727.0
    record identifier: in00001711758