rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Semiconductors for micro- and nanotechnology
    sub title: an introduction for engineers
  name:
    name part: Korvink, J. G. (Jan G.)
    role:
      role term: creator
  name:
    name part: Greiner, Andreas.
  type of resource: text
  origin info:
    place:
      place term: enk
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 340 pages : illustrations ; 24 cm.
  note: Jan G. Korvink and Andreas Greiner.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    genre: Textbooks
  subject:
    topic: Nanotechnology
    genre: Textbooks
  subject:
    topic: Microtechnology
    genre: Textbooks
  classification: 621.38152
  identifier: 3527302573
  record info:
    record content source: UKM
    record creation date: 020722
    record change date: 20151024160333.0
    record identifier: in00001708771