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Nanopatterning--from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Author: Symposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology" Boston, Mass.
Other Authors: Merhari, Lhadi
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2002]
Series:Materials Research Society symposia proceedings ; v. 705.
Subjects:
Nanostructures > Congresses.
Nanotechnology > Congresses.
Microlithography > Congresses.
Integrated circuits > Ultra large scale integration > Congresses.
Biotechnology > Congresses.
Description
Physical Description:xiii, 338 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558996419