Geometric nonlinear analysis of microbeam under electrostatic loading /
This study investigates the behavior of a microbeam subjected to electrostatic loading. Two devices, namely, a tungsten microtweezer and a clamped-clamped beam which is part of a micro-electromechanical system (MEMS), are used as the vehicles to substantiate this research. The deflection of beams is...
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| Format: | Thesis eBook |
| Language: | English |
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[Place of publication not identified] :
[publisher not identified] ;
2001.
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| Subjects: | |
| Online Access: | Link to OAKTrust copy |
| Summary: | This study investigates the behavior of a microbeam subjected to electrostatic loading. Two devices, namely, a tungsten microtweezer and a clamped-clamped beam which is part of a micro-electromechanical system (MEMS), are used as the vehicles to substantiate this research. The deflection of beams is studied for various cases of loading, i.e., constant loading, linear loading and nonlinear loading. Both linear and non-linear behavior of the microbeams are studied for the above mentioned cases of loading. The Euler-Bernoulli beam theory as well as the Timoshenko beam theory is used to study deflection of the beams. Governing equations are solved for each case by two different approaches. Simple cases of the governing equations are solved analytically. The nonlinear differential equation is solved by the finite element method. Results for different cases are compared and discussed. |
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| Item Description: | "Major subject: Mechanical Engineering". Vita. |
| Physical Description: | ix, 98 leaves : illustrations ; 28 cm. Also available online. Issued also on microfiche from Lange Micrographics. |
| Bibliography: | Includes bibliographical references (leaves 95-97). |