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18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January 2002, Munich, Germany /

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Bibliographic Details
Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents Munich, Germany, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Society of Photo-optical Instrumentation Engineers
Other Authors: Behringer, Uwe F. W.
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2002]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4764.
Subjects:
Integrated circuits > Masks > Congresses.
Microlithography > Congresses.
Description
Physical Description:xiii, 256 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819445312