Cover Image

Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Starikov, Alexander, 1952-, Tobin, Kenneth W.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2002]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4692.
Subjects:
Integrated circuits > Design and construction > Congresses.
Integrated circuits > Defects > Analysis > Congresses.
Semiconductors > Design and construction > Congresses.
Semiconductor wafers > Defects > Analysis > Congresses.
Microelectronics industry > Quality control > Congresses.
Quality control > Congresses.
Description
Physical Description:xv, 628 pages : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819444391