Cover Image

Si front-end processing : physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, USA /

Bibliographic Details
Other Authors: Jones, Erin C.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2001]
Series:Materials Research Society symposia proceedings ; v 669.
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor doping > Congresses.
Silicon > Congresses.
Semiconductors > Defects > Congresses.
Description
Physical Description:1 volume (various pagings) : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558996052