APA (7th ed.) Citation

Jones, E. C. (2001). Si front-end processing: Physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, USA. Materials Research Society.

Chicago Style (17th ed.) Citation

Jones, Erin C. Si Front-end Processing: Physics and Technology of Dopant-defect Interactions III : Symposium Held April 17-19, 2001, San Francisco, California, USA. Warrendale, Pa.: Materials Research Society, 2001.

MLA (9th ed.) Citation

Jones, Erin C. Si Front-end Processing: Physics and Technology of Dopant-defect Interactions III : Symposium Held April 17-19, 2001, San Francisco, California, USA. Materials Research Society, 2001.