Carbon-containing layers on silicon : growth, properties, and applications /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Uetikon-Zuerich, Switzerland ; Enfield, N.H. :
Trans Tech Publications,
[1999]
|
| Series: | Materials science foundations ;
v. 7. |
| Subjects: |
| Physical Description: | 77 pages : illustrations ; 25 cm. |
|---|---|
| Bibliography: | Includes bibliographical references (pages 72-77). |
| ISBN: | 0878498346 |