APA (7th ed.) Citation

Osten, H. J. (1999). Carbon-containing layers on silicon: Growth, properties, and applications. Trans Tech Publications.

Chicago Style (17th ed.) Citation

Osten, H. J. Carbon-containing Layers on Silicon: Growth, Properties, and Applications. Uetikon-Zuerich, Switzerland ; Enfield, N.H.: Trans Tech Publications, 1999.

MLA (9th ed.) Citation

Osten, H. J. Carbon-containing Layers on Silicon: Growth, Properties, and Applications. Trans Tech Publications, 1999.