APA (7th ed.) Citation

Symposium on Photomask Technology Monterey, California, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Dao, G. T., & Grenon, B. J. (2002). 21st Annual BACUS Symposium on Photomask Technology: 3-5 October, 2001 Monterey, USA. SPIE.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology Monterey, California, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Giang T. Dao, and Brian J. Grenon. 21st Annual BACUS Symposium on Photomask Technology: 3-5 October, 2001 Monterey, USA. Bellingham, Washington: SPIE, 2002.

MLA (9th ed.) Citation

Symposium on Photomask Technology Monterey, California, et al. 21st Annual BACUS Symposium on Photomask Technology: 3-5 October, 2001 Monterey, USA. SPIE, 2002.