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Handbook of chemicals and gases for the semiconductor industry /

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Bibliographic Details
Main Author: Miśra, Āśutosha, 1970-
Other Authors: Hogan, Jeremiah D., Chorush, Russell
Format: Book
Language:English
Published: New York : Wiley-VCH, [2002]
Subjects:
Chemicals > Handbooks, manuals, etc.
Semiconductors > Materials > Handbooks, manuals, etc.
Description
Physical Description:xiii, 363 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0471316717 (cloth : alk. paper)