Microsystem technologies : sensors, actuators, systems integration.

Journal of microlithography, microfabrication, and microsystems.
Published: (2002)

Micromechanical sensors, actuators, and systems : presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, Georgia, December 1-6, 1991 /
Published: (1991)

Micromechanics and nanoscale effects : MEMS, multi-scale matrials [as printed] and micro-flows /
Published: (2004)

Micromechanics and MEMS : classic and seminal papers to 1990 /
Published: (1997)

Microsystem technology /
by: Menz, W. (Wolfgang)
Published: (2001)

Microsystem technology /
by: Menz, W. (Wolfgang)
Published: (2001)

Sensors and actuators.
Published: (1984)

Sensors and actuators.
Published: (1990)

Proceedings of the 10th Italian Conference, Sensors and Microsystems, Firenze, Italy, 15-17 February 2005 /
Published: (2008)

MEMS and microsystems : design and manufacture /
by: Hsu, Tai-Ran
Published: (2002)

MEMS and microsystems : design, manufacture, and nanoscale engineering /
by: Hsu, Tai-Ran
Published: (2008)

Novel advances in microsystems technologies and their applications /
Published: (2014)

Novel advances in microsystems technologies and their applications /
Published: (2014)

Microelectronics and microsystems : emergent design techniques /
Published: (2002)

Russian microelectronics.

Russian microelectronics.

1998 International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators : MSM '98, Santa Clara : April 6-8, 1998, Santa Clara, California /
Published: (1998)

2005 NSTI Nanotechnology Conference and Trade Show : NSTI Nanotech 2005 : Anaheim, May 8-12, 2005 /
Published: (2005)

NSTI Nanotech 2004 : 2004 NSTI Nanotech Nanotechnology Conference and Trade Show, March 7-11, 2004, Boston, Massachusetts, USA /
Published: (2004)

Digest of technical papers /
Published: (2003)

Soviet microelectronics.

Microelectronics.

Microsystem engineering of lab-on-a-chip devices /
Published: (2008)

Microsystem engineering of lab-on-a-chip devices /
Published: (2004)

Journal of micro/nanolithography, MEMS, and MOEMS : JM³.
Published: (2007)

Proceedings of the Topical Workshop on Heterostructure of Microelectronics.
Published: (1994)

Laser diode microsystems /
by: Zappe, Hans P.
Published: (2004)

Microsensors : principles and applications /
by: Gardner, J. W. (Julian W.), 1958-
Published: (1994)

Simulation and design of microsystems and microstructures /
Published: (1995)

Microelectronics, Microsystems, and Nanotechnology : papers presented at MMN 2000, Athens, Greece, 20-22 November, 2000 /
Published: (2001)

Microelectronics international.

The International journal for hybrid microelectronics.

Microelectronics journal.

Proceedings : IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994 /
Published: (1994)

IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany /
Published: (1998)

IEEE, the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, San Diego, California, USA, February 11-15, 1996 /
Published: (1996)