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Microsystem technologies : sensors, actuators, systems integration.

Bibliographic Details
Uniform Title:Microsystem technologies (Online)
Format: Journal
Language:English
Published: Berlin : Springer.
Subjects:
Microelectronics > Periodicals.
Transducers > Periodicals.
Actuators > Periodicals.
Online Availability: Check for online availability
Description
Published:Print began with vol. 1, no. 1 (Oct. 1994).
Item Description:Description based on: Volume 2, issue 2 (1996); title from journal home page (viewed Jan. 5, 2000).
Latest issue consulted: Volume 6, issue 5 (2000).
Electronic resource.
Physical Description:Online version of: Microsystem technologies.
Format:Mode of access: World Wide Web.
ISSN:1432-1858
0946-7076