Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August, 2001, San Diego, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Duparré, Angela, Singh, Bhanwar
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4449.
Subjects:

MARC

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245 0 0 |a Optical metrology roadmap for the semiconductor, optical, and data storage industries II :  |b 2-3 August, 2001, San Diego, USA /  |c Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering. 
246 3 0 |a Optical metrology roadmap for the semiconductor, optical and data storage industries two 
246 3 |a Optical metrology roadmap for the semiconductor, optical and data storage industries 2 
264 1 |a Bellingham, Washington :  |b SPIE,  |c [2001] 
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300 |a ix, 294 pages :  |b illustrations ;  |c 28 cm. 
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504 |a Includes bibliographical references and index. 
650 0 |a Optical measurements  |x Industrial applications  |v Congresses. 
650 0 |a Surfaces (Technology)  |x Measurement  |v Congresses. 
650 0 |a Optoelectronic devices  |x Industrial applications  |v Congresses. 
650 0 |a Information retrieval  |x Technological innovations  |v Congresses. 
700 1 |a Duparré, Angela. 
700 1 |a Singh, Bhanwar. 
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