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Second Indicator |
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| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00001668513 |
| 005 |
20151024121356.0 |
| 008 |
020215s2001 waua b 101 0 eng d |
| 020 |
|
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|a 0819441635
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| 035 |
|
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|a (OCoLC)ocm49011017
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| 040 |
|
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|a LHL
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|d TXA
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| 049 |
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|a TXAM
|
| 090 |
|
|
|a TA418.7
|b .O69 2001
|
| 245 |
0 |
0 |
|a Optical metrology roadmap for the semiconductor, optical, and data storage industries II :
|b 2-3 August, 2001, San Diego, USA /
|c Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
|
| 246 |
3 |
0 |
|a Optical metrology roadmap for the semiconductor, optical and data storage industries two
|
| 246 |
3 |
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|a Optical metrology roadmap for the semiconductor, optical and data storage industries 2
|
| 264 |
|
1 |
|a Bellingham, Washington :
|b SPIE,
|c [2001]
|
| 264 |
|
4 |
|c ©2001
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| 300 |
|
|
|a ix, 294 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings / SPIE--the international society for optical engineering ;
|v v. 4449
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Optical measurements
|x Industrial applications
|v Congresses.
|
| 650 |
|
0 |
|a Surfaces (Technology)
|x Measurement
|v Congresses.
|
| 650 |
|
0 |
|a Optoelectronic devices
|x Industrial applications
|v Congresses.
|
| 650 |
|
0 |
|a Information retrieval
|x Technological innovations
|v Congresses.
|
| 700 |
1 |
|
|a Duparré, Angela.
|
| 700 |
1 |
|
|a Singh, Bhanwar.
|
| 710 |
2 |
|
|a Society of Photo-optical Instrumentation Engineers.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 4449.
|
| 948 |
|
|
|a cataloged
|b h
|c 2002/3/4
|d c
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|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
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|e TA418.7 .O69 2001
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|i unmediated -- volume
|m A14828474652
|
| 998 |
f |
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|a TA418.7 .O69 2001
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|l Remote Storage
|