APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Duparré, A., & Singh, B. (2001). Optical metrology roadmap for the semiconductor, optical, and data storage industries II: 2-3 August, 2001, San Diego, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Angela Duparré, and Bhanwar Singh. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II: 2-3 August, 2001, San Diego, USA. Bellingham, Washington: SPIE, 2001.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II: 2-3 August, 2001, San Diego, USA. SPIE, 2001.