Applied microtechnology : LIGA, laser, micro precision engineering : with 166 figures, tables and CD-ROM /

4M2006 : Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France /
Published: (2006)

Semiconductors for micro- and nanotechnology : an introduction for engineers /
by: Korvink, J. G. (Jan G.)
Published: (2002)

Semiconductors for micro- and nanotechnology : an introduction for engineers /
by: Korvink, J. G. (Jan G.)
Published: (2002)

4M2006 : Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France /
Published: (2006)

Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia /
Published: (2007)

Micro- and nanotechnology : materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia /
Published: (2005)

Microtechnology and MEMS.

Journal of micro- and nano-manufacturing.
Published: (2013)

Fundamentals of micromechanics of solids /
by: Qu, Jianmin
Published: (2006)

Fundamentals of micromechanics of solids /
by: Qu, Jianmin
Published: (2006)

Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain /
Published: (2007)

Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain /
Published: (2005)

Smart sensors, actuators, and MEMS : 19-21 May 2003, Maspalomas, Gran Canaria, Spain /
Published: (2003)

Laser systems and applications /
by: Jain, V. K.
Published: (2013)

Reliability of microtechnology /
Published: (2010)

Introduction to laser spectroscopy /
by: Abramczyk, Halina
Published: (2005)

4M2007 : Third International Conference on Multi-Material Micro Manufacture /
Published: (2007)

Micro-optomechatronics /
Published: (2005)

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /
by: Lyshevski, Sergey Edward
Published: (2005)

Introduction to microelectromechanical systems engineering /
by: Maluf, Nadim
Published: (2004)

Micro, nanosystems, and systems on chips : modeling, control, and estimation /
Published: (2010)

Micro, nanosystems, and systems on chips : modeling, control, and estimation /
Published: (2010)

Advances in multiphysics simulation and experimental testing of MEMS /
Published: (2008)

Microelectromechanical systems, materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, USA /
Published: (2008)

Advanced materials and technologies for micro/nano-devices, sensors and actuators / Proceedings of the NATO Advanced Research Worskhop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators.
Published: (2010)

Classical theory of free-electron lasers : a text for students and researchers /
by: Szarmes, Eric B.
Published: (2014)

Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA /
Published: (2001)

Handbook of silicon based MEMS materials and technologies /
Published: (2010)

Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA /
Published: (2005)

Reliability, testing, and characterization of MEMS/MOEMS III : 26-28 January 2004, San Jose, California, USA /
Published: (2004)

Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA /
Published: (2003)

MOEMS : micro-opto-electro-mechanical systems /
Published: (2005)

Micro electromechanical systems (MEMS) : practical lab manual /
by: Kumar, Sanjeet
Published: (2025)

Nano- and microelectromechanical systems : fundamentals of nano- and microengineering /
by: Lyshevski, Sergey Edward
Published: (2001)

Mechanics of microelectromechanical systems /
by: Lobontiu, Nicolae
Published: (2005)

Analysis and design principles of MEMS devices /
by: Bao, Min-Hang
Published: (2005)