Society of Photo-optical Instrumentation Engineers, United States. Air Force. Asian Office of Aerospace Research and Development, Institute of Electrical and Electronics Engineers. South Australia Section, & Franzon, P. D. (2001). Design, characterization, and packaging for MEMS and microelectronics II: 17-19 December 2001, Adelaide, Australia. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, United States. Air Force. Asian Office of Aerospace Research and Development, Institute of Electrical and Electronics Engineers. South Australia Section, and Paul D. Franzon. Design, Characterization, and Packaging for MEMS and Microelectronics II: 17-19 December 2001, Adelaide, Australia. Bellingham, Washington: SPIE, 2001.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. Design, Characterization, and Packaging for MEMS and Microelectronics II: 17-19 December 2001, Adelaide, Australia. SPIE, 2001.