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Device and process technologies for MEMS and microelectronics II : 17-19 December 2001, Adelaide, Australia /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, United States. Air Force. Asian Office of Aerospace Research and Development, Institute of Electrical and Electronics Engineers. South Australia Section
Other Authors:	Chaio, Jung-Chih
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4592.
Subjects:	Microelectromechanical systems > Congresses. Photon detectors > Design and construction > Congresses. Photomechanical processes > Congresses. Photolithography > Congresses.

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