http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Device and process technologies for MEMS and microelectronics II
17-19 December 2001, Adelaide, Australia
Device and process technologies for MEMS and microelectronics two
Device and process technologies for MEMS and microelectronics 2
Society of Photo-optical Instrumentation Engineers
Asian Office of Aerospace Research and Development.
Institute of Electrical and Electronics Engineers
Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development [and others] ; cooperating organization, IEEE South Australia Section.
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4592