| Tag |
First Indicator |
Second Indicator |
Subfields |
| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00001664580 |
| 005 |
20151024121551.0 |
| 008 |
020221s2001 waua b 101 0 eng d |
| 020 |
|
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|a 0819443220
|
| 035 |
|
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|a (OCoLC)ocm49052655
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| 040 |
|
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|a LHL
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|d TXA
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| 049 |
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|a TXAM
|
| 090 |
|
|
|a TK7875
|b .D48 2001
|
| 245 |
0 |
0 |
|a Device and process technologies for MEMS and microelectronics II :
|b 17-19 December 2001, Adelaide, Australia /
|c Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development [and others] ; cooperating organization, IEEE South Australia Section.
|
| 246 |
3 |
0 |
|a Device and process technologies for MEMS and microelectronics two
|
| 246 |
3 |
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|a Device and process technologies for MEMS and microelectronics 2
|
| 264 |
|
1 |
|a Bellingham, Washington :
|b SPIE,
|c [2001]
|
| 264 |
|
4 |
|c ©2001
|
| 300 |
|
|
|a xi, 538 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings / SPIE--the international society for optical engineering ;
|v v. 4592
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|v Congresses.
|
| 650 |
|
0 |
|a Photon detectors
|x Design and construction
|v Congresses.
|
| 650 |
|
0 |
|a Photomechanical processes
|v Congresses.
|
| 650 |
|
0 |
|a Photolithography
|v Congresses.
|
| 700 |
1 |
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|a Chaio, Jung-Chih.
|
| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers.
|
| 710 |
1 |
|
|a United States.
|b Air Force.
|b Asian Office of Aerospace Research and Development.
|
| 710 |
2 |
|
|a Institute of Electrical and Electronics Engineers.
|b South Australia Section.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 4592.
|
| 948 |
|
|
|a cataloged
|b h
|c 2002/3/6
|d c
|e dmitchel
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|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
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|e TK7875 .D48 2001
|h Library of Congress classification
|i unmediated -- volume
|m A14828690135
|
| 998 |
f |
f |
|a TK7875 .D48 2001
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|