MARC

Tag First Indicator Second Indicator Subfields
LEADER 00000cam a2200000 a 4500
001 in00001664580
005 20151024121551.0
008 020221s2001 waua b 101 0 eng d
020 |a 0819443220 
035 |a (OCoLC)ocm49052655 
040 |a LHL  |c LHL  |d TXA  |d UtOrBLW 
049 |a TXAM 
090 |a TK7875  |b .D48 2001 
245 0 0 |a Device and process technologies for MEMS and microelectronics II :  |b 17-19 December 2001, Adelaide, Australia /  |c Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development [and others] ; cooperating organization, IEEE South Australia Section. 
246 3 0 |a Device and process technologies for MEMS and microelectronics two 
246 3 |a Device and process technologies for MEMS and microelectronics 2 
264 1 |a Bellingham, Washington :  |b SPIE,  |c [2001] 
264 4 |c ©2001 
300 |a xi, 538 pages :  |b illustrations ;  |c 28 cm. 
336 |a text  |b txt  |2 rdacontent 
337 |a unmediated  |b n  |2 rdamedia 
338 |a volume  |b nc  |2 rdacarrier 
490 1 |a Proceedings / SPIE--the international society for optical engineering ;  |v v. 4592 
504 |a Includes bibliographical references and index. 
650 0 |a Microelectromechanical systems  |v Congresses. 
650 0 |a Photon detectors  |x Design and construction  |v Congresses. 
650 0 |a Photomechanical processes  |v Congresses. 
650 0 |a Photolithography  |v Congresses. 
700 1 |a Chaio, Jung-Chih. 
710 2 |a Society of Photo-optical Instrumentation Engineers. 
710 1 |a United States.  |b Air Force.  |b Asian Office of Aerospace Research and Development. 
710 2 |a Institute of Electrical and Electronics Engineers.  |b South Australia Section. 
830 0 |a Proceedings of SPIE--the International Society for Optical Engineering ;  |v v. 4592. 
948 |a cataloged  |b h  |c 2002/3/6  |d c  |e dmitchel  |f 1:26:08 pm 
994 |a E0  |b TXA 
999 |a MARS 
999 f f |s ba85f7e3-0ac7-3f94-80b1-4623bd190b0b  |i 74304616-09b5-3f0c-bf08-dd0c89fde1eb  |t 0 
952 f f |p ric  |a Texas A&M University  |b Rellis Campus  |c Joint Library Facility  |d Remote Storage  |t 0  |e TK7875 .D48 2001  |h Library of Congress classification  |i unmediated -- volume  |m A14828690135 
998 f f |a TK7875 .D48 2001  |t 0  |l Remote Storage